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Microsystems, Electronics and Acoustics
ISSN 2523-4447 · e‑ISSN 2523-4455 Open Access · CC BY-SA 4.0
Vol. 22 · Issue 5 · 2017 Nov 6, 2017 Electronic systems

Measuring transducer of angular displacements using phase raids of the surface acoustic waves electric field

MZ
Mykola Fedorovych Zhovnir Corresponding National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute” Ukraine
Pages20-28 PublishedNov 6, 2017
VOL 22 · ISS 5 · 2017 View issue

Abstract

The phase method for angular displacement unambiguous measurement based on the use of surface acoustic waves (SAW) devices is proposed and theoretically grounded. To eliminate any ambiguity of phase measurements, the construction of acousto-electronic angular displacement transducer using phase incursion of several SAW on the surface of the piezoelectric circular waveguide at different frequencies is proposed. The information parameters that determine the position of SAW receiver are measured at these frequencies. The rating of potential metrological parameters of the 3-frequency angular displacement transducer in the range 0…..360 degrees with the formation of precise, intermediate and rough measurement scales is carried out. The use of phase incursion on the surface of the piezoelectric waveguide electric field of three SAW at different frequencies taking by moving SAW receiver allows to form precise, intermediate and rough measurement scales in accordance with 11, 6 and 5 binary digits representing the measurement results. The experimental test results of models of a 3-frequency generator block, an amplifying-selective block and a 3-frequencies angular displacement transducer containing circular piezoelectric waveguide with a radius of 15 mm based on zinc oxide-fused quartz structure over which displaces a circular sectional SAW receiver are presented. The amplitude of the SAW receiver output signal varies exponentially depending on a gap between the piezoelectric waveguide surface and SAW receiver. It requires high precision of transducer manufacturing to ensure parallel to the acoustic line surface movement of receiver thus eliminating the influence of the phase velocity dispersion of the surface acoustic wave as a result of the SAW receiver electric field perturbation on the accuracy of measurements. Grading characteristics of angular displacement transducer are linear. The coefficients of angular displacement transformation on the precise scales are 0.54, 0.55 and 0.56 electric degrees/arcsec in the central frequencies of 69.52, 70.62 and 71.69 MHz. At the same time, the resolution and angular displacements measurement error on the precise scale are respectively less than 0.5 arcsec and 1.5 arcsec. The test results of model based on piezoelectric waveguide of zinc oxide-fused quartz structure confirm the possibility of creating highly sensitive angular displacements transducers with a resolution and accuracy properties that are close to the parameters of inductosyns, photoelectric transducers and laser interferometers. However, it may have considerably less weight and dimensions, cost and complexity of construction. Ref. 20, fig.6.

Keywords

References

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