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Microsystems, Electronics and Acoustics
ISSN 2523-4447 · e‑ISSN 2523-4455 Open Access · CC BY-SA 4.0
Vol. 29 · Issue 2 · 2024 Aug 14, 2024 Review articles

A Review of Broadband Microfabricated Ultrasonic Systems for Biomedical Applications

RK
Roman Yuriiovych Kostiuk Corresponding Національний технічний університет України «Київський політехнічний інститут імені Ігоря Сікорського» Ukraine
SN
Serhii Anatoliiovyh Naida Національний технічний університет України «Київський політехнічний інститут імені Ігоря Сікорського» Ukraine
Pages314787.1-314787.12 PublishedAug 14, 2024
PDF (Ukrainian)
VOL 29 · ISS 2 · 2024 View issue

Abstract

Starting from an overview of historical aspects of biomedical ultrasound development and its application areas, as well as the brief description of state-of-the art microfabrication technologies, used for capacitive and piezoelectrical micromachined ultrasonic transducers manufacturing, also outlining their modelling approaches, the reader will be further presented with an overview of existing methods for achieving broadband operation both at unit transducer and transducers array levels. Moreover, a generalized signal processing system is discussed, including description of known approaches for building blocks implementation in analog, digital and mixed-signal domains (such as drivers, amplifiers, ADCs, etc.).

Keywords

#biomedical ultrasound #wideband transducers #micromachined ultrasonic transducers (MUTs) #CMUT #PMUT #ASIC #CMOS

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