The paper is devoted to the system for measuring the stability of the angles Yaw (θz), Pitch (θy) and Roll (θx) of a linear piezoelectric motor type LPM5 / BSP-1540SL, which allowed to measure the angular deviations of the piezoelectric carriage depending on its position. The system was based on the use of the auto-collimation method, which provided the measurement of the angular discrepancy between its own optical axis of the auto-collimator and the normal to the plane of the mirror-reflecting surface. To measure the angular deviation of the carriage of the engine was used AK-0,5U auto-collimator with an optical resolution of 0.5 arc seconds. The auto-collimator scale was marked up in steps of 0.5 arcmin (30 arcsec), and its informative optical reference was made as a green intersection. This feature was later used to determine its position on the image obtained with the CCD matrix OV5647. The image obtained from the matrix had a resolution of 1024x768 pixels. In the matrix image, the distance between adjacent labels (auto-collimator scale step) was ~ 35 pixels, that is, the electronic resolution of the matrix was near to ~ 1 arc second. For control the engine speed and its position was used an optical encoder iC-PX3212 with a resolution of 2.6 µm. The control system also includes a single-board computer RaspberryPi 3B + , which allowed to control the engine via USB data protocol, receive images via MIPI-CSI protocol, process images from the array, and output it to the monitor via HDMI. During the experiment, 376 images were obtained (188 images when measuring Pitch, Yaw angles, and 188 images when measuring Roll angle). Image processing was performed using PIL (image) and "numpy" libraries in Python programming language. Was demonstrated the possibility of measuring angular stability over a large distance of movement with an accuracy of 5 arc.sec. On the basis of the experimental results obtained, it was found that most changed the angles of Pitch and Roll (~ 3 angular minutes). The results obtained by measuring the angles of Pitch, Yaw and Roll make it possible to develop a model of errors of a multi-axis micromanipulation system in order to take them into account when designing the control system.
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