Deposition of Molybdenum Oxide Thin Films for Flexible Biodegradable Electronics

Abstract

With its unprecedented properties over conventional rigid platforms, flexible electronics have been a signifi cant research topic in the last decade, offering a broad range of applications from bendable display, flexible solarenergy  systems, to soft implantable-devices for health monitoring. Flexible electronics is a disruptive science that requires a high level of multi-disciplinary research, including chemistry, physics, material science, electronic and electrical engineering, mechanical engineering, computing science, biomedical engineering. The deep cross-integrate of it with other key subjects  such as artificial intelligence, material science, Internet of things, space science, health science, energy science and data science, breaks through the intrinsic limitations of convention silicon electronics and affords unprecedented opportunities for relative industries involving integrated circuit, new and renewable. One way to reduce the cost of photoconverters is to use transition metal oxide, which is characterized by better solar energy conversion efficiency. MoO3 is one of the promising candidates due to its nontoxicity, deep electronic state and relative lower vaporization temperature, which can easily deposited in vacuum. In contrast, the other transition metal oxides need relative higher evaporation temperature to deposit the film. The conventional and common fabrication methods for MoO3 are thermal evaporation or sputtering under vacuum. This work presents molybdenum oxide films grown on nano cellulose. Molybdenum oxide thin films were grown by reactive ion beam sputtering on UVN-75R equipment. Measure ments of thin film transparency spectra and the effect of bending on the transparency value were measured using a 4802  UV/VIS Double Beam Spectrophotometer. The energy-dispersion X-ray spectrum showed no impurities. The chemical com position of molybdenum oxide thin films was studied on the basis of energy-dispersion analysis, in which the characteristic X-ray radiation of the sample surface under the action of accelerated electron irradiation was recorded. For this purpose, a scanning electron microscope REM 106U in the mode of elemental microanalysis was used. The films show high transparency in the visible spectrum, as well as a low influence of bending on the transparency in the ultraviolet spectrum. Bending of the manufactured samples reduces the amount of transparency. Increasing the deposition temperature of the films has the same effect as bending. Combining the excellent electrical properties of MoOx and the high flexibility and transparency of nanocellulose, an excellent replacement for silicon heterostructures has been demon strated. 

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Copyright (c) 2026 Анна Сергіївна Гондовська, Роман Ігорович Дідусь, Владислав Анатолійович Лапшуда, Ольга Василівна Ященко (Автор)